Exposure apparatus and device manufacturing method

ABSTRACT

A liquid confinement member supplies liquid to and collects the liquid from a liquid immersion area formed adjacent to a final optical element of an immersion exposure apparatus, and includes a channel formation member that surrounds a portion of the final optical element of the immersion exposure apparatus. The channel formation member includes a hole through which exposure light projected by the final optical element passes, a liquid supply opening through which the liquid is supplied to the liquid immersion area, a liquid recovery opening through which the liquid is recovered from the liquid immersion area, a liquid supply channel by which the liquid is supplied to the liquid supply opening, and a liquid recovery channel by which the liquid is recovered from the liquid recovery opening. At least one of the liquid supply and liquid recovery channels includes a protrusion into a portion of the channel.

CROSS-REFERENCE TO RELATED APPLICATION

This is a Divisional of U.S. patent application Ser. No. 14/311,918filed Jun. 23, 2014, which in turn is a Divisional of U.S. patentapplication Ser. No. 13/449,041 filed Apr. 17, 2012 (now U.S. Pat. No.8,797,505), which in turn is a Divisional of U.S. patent applicationSer. No. 12/320,771 filed Feb. 4, 2009 (now U.S. Pat. No. 8,218,127),which is a Divisional of U.S. patent application Ser. No. 11/325,474filed Jan. 5, 2006 (now U.S. Pat. No. 7,508,490), which is aContinuation of International Application No. PCT/JP2004/010057, filedJul. 8, 2004, which claims priority to Japanese Patent Application No.2003-272617 (filed on Jul. 9, 2003). The contents of each of theaforementioned applications are incorporated herein by reference intheir entireties.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to an exposure apparatus that exposes apattern on a substrate via a projection optical system and a liquid andto device manufacturing method.

2. Description of Related Art

The semiconductor device or the liquid crystal display device ismanufactured by the technique known as photolithography, in which apattern formed on a mask is transferred onto a photosensitive substrate.The exposure apparatus used in this photolithography process has a maskstage that supports a mask and a substrate stage that supports asubstrate, and it transfers a mask pattern to a substrate via aprojection optical system while sequentially moving the mask stage andthe substrate stage. In recent years, it is demanded to realize thehigher resolution of the projection optical system in order to respondto the further advance of the higher integration of the device pattern.As the exposure wavelength to be used is shorter, the resolution of theprojection optical system becomes higher. As the numerical aperture ofthe projection optical system is larger, the resolution of theprojection optical system becomes higher. Therefore, the exposurewavelength, which is used for the exposure apparatus, is shortened yearby year, and the numerical aperture of the projection optical system isincreased as well. The exposure wavelength, which is dominantly used atpresent, is 248 nm of the KrF excimer laser. However, the exposurewavelength of 193 nm of the ArF excimer laser, which is shorter than theabove, is also practically used in some situations. When the exposure isperformed, the depth of focus (DOF) is also important in the same manneras the resolution. The resolution R and the depth of focus 8 arerepresented by the following expressions respectively.

R=k ₁ ·λ/NA,   (1)

δ=±k ₂ ·λ/NA ²,   (2)

In the expressions, λ represents the exposure wavelength, NA representsthe numerical aperture of the projection optical system, and k₁ and k₂represent the process coefficients. According to the expressions (1) and(2), the following fact is appreciated. That is, when the exposurewavelength λ is shortened and the numerical aperture NA is increased inorder to enhance the resolution R, then the depth of focus δ isnarrowed.

If the depth of focus δ is too narrowed, it is difficult to match thesubstrate surface with respect to the image plane of the projectionoptical system. It is feared that the margin is insufficient during theexposure operation. Accordingly, the liquid immersion method has beensuggested, which is disclosed, for example, in PCT InternationalPublication No. WO99/49504 as a method for substantially shortening theexposure wavelength and widening the depth of focus. In this liquidimmersion method, the space between the lower surface of the projectionoptical system and the substrate surface is filled with a liquid such aswater or any organic solvent to form a liquid immersion area so that theresolution is improved and the depth of focus is magnified about n timesby utilizing the fact that the wavelength of the exposure light beam inthe liquid is 1/n as compared with that in the air (n represents therefractive index of the liquid, which is about 1.2 to 1.6 in ordinarycases). As far as is permitted by the law of the country specified orselected in this patent application, the disclosures in PCTInternational Publication No. WO99/49504 are incorporated herein byreference.

If the supply of liquid from the supply port of the liquid supplymechanism is uneven when the liquid is supplied onto the substrate toform a liquid immersion region, there is a possibility of occurrence ofan inconvenience such as the formation of the liquid immersion regionbecoming inadequate, leading to deterioration of the pattern imageexposed onto the substrate. For this reason, even (uniform) supply ofliquid from the supply port of the liquid supply mechanism is also indemand. The prevention of mixing in of impurities such as bubbles, etc.into the liquid immersion region is also in demand in order to preventdeterioration of the pattern image exposed on the substrate.

Furthermore, it is also important that the liquid on the substrate berecovered well. When the liquid cannot be adequately recovered, forexample, the liquid that remains on the substrate dries, a water mark isproduced there, and an inconvenience in which the remaining liquid isscattered to the peripheral mechanical components when, for example, thesubstrate is conveyed and rust is caused also occurs. In addition, whenliquid remains and is scattered, there is a possibility that themeasuring operations relating to exposure processing will be affected,such as by fluctuations being brought about in the environment(temperature, etc.) in which the substrate is placed, causing changes inthe refractive index on the optical path of the detection light of theoptical interferometer used in stage position measurement, therebycausing exposure precision to degraded.

SUMMARY OF THE INVENTION

The present invention was made taking such circumstances into account,and its purpose is to provide an exposure apparatus that is able toprevent pattern image deterioration and perform exposure processing withgood accuracy when the pattern is exposed onto a substrate via aprojection optical system and a liquid, and to provide a devicemanufacturing method.

The first aspect of the present invention is an exposure apparatus thatexposes a substrate by forming a liquid immersion region on thesubstrate, and projecting a pattern image onto the substrate via aprojection optical system and a liquid that forms the liquid immersionregion, the exposure apparatus including: a liquid supply mechanism thathas a supply port arranged to oppose a surface of the substrate; and abuffer space formed in a channel of the liquid supply mechanism, whereinthe liquid is supplied to the supply port after reserving a prescribedamount or more of liquid in the buffer space.

According to this aspect, when liquid is supplied from the supply portthat opposes the substrate surface, by supplying the liquid afterreserving a prescribed amount or more in the buffer space, the flowvolume distribution and the flow rate distribution of the liquid withrespect to the supply port can be made uniform. Therefore, the liquidcan be evenly supplied onto the substrate from the supply port.

The second aspect of the present invention is an exposure apparatus thatexposes a substrate by forming a liquid immersion region on thesubstrate, and projecting a pattern image onto the substrate via aprojection optical system and a liquid that forms the liquid immersionregion, the exposure apparatus including: a liquid supply mechanism thathas a supply port arranged to oppose a surface of the substrate; and achannel being connected to the supply port of the liquid supplymechanism, the channel having a corner and a channel portion disposed invicinity of the corner, the channel portion being made narrower than thechannel in front thereof.

According to this aspect, bubbles are likely to remain in the vicinityof the corner of the channel, but the flow rate of the liquid isincreased by narrowing the channel in the vicinity of this corner, andthe bubbles can be discharged to the exterior via the supply port due tothe increased flow rate of the liquid. Therefore, by performing theliquid immersion exposure operation after the bubbles are dischargedfrom the channel, mixing of the bubbles from the channel into the liquidimmersion region can be prevented, and exposure processing can beperformed in a status in which bubbles are not present in the liquidimmersion region.

The third aspect of the present invention is an exposure apparatus thatexposes a substrate by projecting a pattern image onto the substrate viaa projection optical system and a liquid, the exposure apparatusincluding: a liquid supply mechanism that is arranged in vicinity of aterminating end of the projection optical system and supplies theliquid; and a minute gap that is formed between a side surface of theliquid supply mechanism and a side surface of an optical member of theterminating end, which comes into contact with the liquid, of theprojection optical system, wherein at least one of the side surface ofthe liquid supply mechanism and the side surface of the optical memberof the terminating end is liquid repellence treated.

According to this aspect, due to the minute gap formed between theliquid supply mechanism and the projection optical system, the vibrationthat is generated by the liquid supply mechanism is not transmitted tothe projection optical system, thus the substrate can be exposed well.Also, by performing liquid repellence treatment for at least one of theside surface of the liquid supply mechanism and the side surface of theoptical member of the terminating end that form this minute gap, it ispossible to prevent penetration of the liquid into the minute gap. Ifliquid has penetrated into the minute gap, there is a possibility thatan inconvenience will occur, wherein the penetrated liquid is in astagnant state, the degree of cleanliness drops, and the liquid in theminute gap of which that degree of cleanliness has dropped mixes intothe liquid immersion region, for example, during liquid immersionexposure. However, penetration of the liquid to the minute gap can beprevented by performing liquid repellence treatment, so it is possibleto prevent the occurrence of the aforementioned inconvenience.

The fourth aspect of the present invention is an exposure apparatus thatexposes a substrate by projecting a pattern image onto the substrate viaa projection optical system and a liquid, the exposure apparatusincluding: a liquid recovery mechanism that is arranged in the vicinityof a terminating end of the projection optical system and that recoversthe liquid; and a minute gap is formed between a side surface of theliquid recovery mechanism and a side surface of the optical member ofthe terminating end, which comes into contact with the liquid, of theprojection optical system, wherein at least one of the side surface ofthe liquid recovery mechanism and the side surface of the optical memberof the terminating end is liquid repellence treated.

Specifically, what is arranged in the vicinity of the terminating end ofthe projection optical system is not limited to a liquid supplymechanism, it may also be a liquid recovery mechanism, and, in this caseas well, it is possible to prevent penetration of the liquid into theminute gap by performing liquid repellence treatment for at least one ofthe side surface of the liquid recovery mechanism and the side surfaceof the optical member of the terminating end that form the minute gap.

The fifth aspect of the present invention is an exposure apparatus thatexposes a substrate by projecting a pattern image onto the substrate viaa projection optical system and a liquid, the exposure apparatusincluding: a liquid recovery mechanism that recovers the liquid on thesubstrate along with a gas in vicinity thereof and has a separator thatseparates a recovered liquid and a recovered gas.

According to this aspect, since, in the case where the liquid recoverymechanism, for example, performs the recovery by sucking in the liquidon the substrate along with the gas in the vicinity thereof by means ofa vacuum system, the separator that separates the recovered liquid andgas is provided in that liquid recovery mechanism, it is possible toprevent the penetration of liquid to the vacuum system such as a vacuumpump. Therefore, it is possible to well maintain the recovery operationof the liquid recovery mechanism for a long period of time whilepreventing the occurrence of inconvenience such as malfunctions of thevacuum system, and it is possible to prevent deterioration of thepattern image due to the residual liquid on the substrate, or the like.

The sixth aspect of the present invention is an exposure apparatus thatexposes a substrate by projecting a pattern image onto the substrate viaa liquid, the exposure apparatus including: a projection optical systemthat projects the pattern image onto the substrate via the liquid; and agap formed between a side surface of an optical member, that comes intocontact with the liquid, among a plurality of optical elements of theprojection optical system and a surface of an object in oppositionthereto, permeation of the liquid to the gap being restricted.

According to this aspect, it is possible to prevent inconvenience suchas the one whereby the liquid that has penetrated to the side surface ofthe optical member remains there, the degree of cleanliness of thatliquid drops, and that liquid with a reduced degree of cleanliness ismixed into the liquid in forming the liquid immersion region on thesubstrate, for example.

The seventh aspect of the present invention is a device manufacturingmethod, and it uses the exposure apparatus described above. According tothis aspect, it is possible to provide a device that has a patternformed with good pattern accuracy that is able to exhibit the desiredperformance.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic block diagram that shows one embodiment of theexposure apparatus of the present invention.

FIG. 2 is a plan view for describing the arrangement of the liquidsupply port and the recovery port.

FIG. 3 is an oblique view that shows the channel formation member thatconstitutes the liquid supply mechanism and the liquid recoverymechanism.

FIG. 4 is an oblique view that shows the first member of the channelformation member.

FIG. 5A and FIG. 5B are oblique views that show the second member of thechannel formation member.

FIG. 6 is an oblique view that shows the third member of the channelformation member.

FIG. 7 is an A-A cross-sectional view of FIG. 3, and it is a drawingthat shows the liquid supply channel and the recovery channel.

FIG. 8 is a B-B cross-sectional view of FIG. 3, and it is a drawing thatshows the liquid recovery channel.

FIG. 9 is a schematic block diagram that shows the gas-liquid separator.

FIG. 10 is a drawing that shows the separation tube of the gas-liquidseparator.

FIG. 11 is an enlarged view of the vicinity of the minute gap.

FIG. 12 is an enlarged view that shows another example of the vicinityof the minute gap.

FIG. 13 is a drawing that shows another embodiment of the liquid supplychannel and the recovery channel.

FIG. 14 is a drawing that shows another embodiment of the liquid supplychannel and the recovery channel.

FIG. 15 is a drawing that shows another embodiment of the liquid supplychannel and the recovery channel

FIG. 16 is an oblique view that shows another example of the bankportion.

FIG. 17 is an oblique view that shows another embodiment of the liquidsupply mechanism and the liquid recovery mechanism.

FIG. 18 is a flow chart that shows an example of the manufacturingprocess of the semiconductor device.

DETAILED DESCRIPTION OF THE INVENTION

The exposure apparatus of the present invention will be explained belowwhile referring to the drawings. However, the present invention is notlimited to the respective embodiments below, and, for example, theconstituent elements of these embodiments may be appropriately combined.

FIG. 1 is a schematic block diagram that shows one embodiment of theexposure apparatus of the present invention.

In FIG. 1, the exposure apparatus EX is provided with a mask stage MSTthat supports a mask M, a substrate stage PST that supports a substrateP, an illumination optical system IL that uses exposure light EL toilluminate the mask M that is supported by the mask stage MST, aprojection optical system PL that projection exposes the pattern imageof the mask M illuminated by the exposure light EL onto the substrate Psupported on the substrate stage PST, and a control apparatus CONT thatcomprehensively controls operation of the entire exposure apparatus EX.

The exposure apparatus EX of the present embodiment is a liquidimmersion exposure apparatus that applies the liquid immersion method toeffectively shorten the exposure wavelength to improve resolution as iteffectively broadens the depth of focus, and it is provided with aliquid supply mechanism 10 that supplies a liquid 1 onto the substrate Pand a liquid recovery mechanism 20 that recovers the liquid 1 on thesubstrate P. The exposure apparatus EX fills the space of the opticalpath on the image plane side of the projection optical system PL with aliquid 1, using the liquid 1 supplied from the liquid supply mechanism10, to form a liquid immersion region AR2 on a portion of the substrateP that includes the projection region AR1 of the projection opticalsystem PL at least while the pattern image of the mask M is beingtransferred onto the substrate P. Specifically, the exposure apparatusEX fills in a liquid 1 between the optical element (optical member) 2 ofthe terminating end portion of the projection optical system PL and thesurface of the substrate P and exposes the substrate P by projecting thepattern image of the mask M onto the substrate P via the projectionoptical system PL and the liquid 1 between this projection opticalsystem PL and the substrate P.

Here, in this embodiment, an explanation will be given which uses as anexample the case of a scanning exposure apparatus (a so-called scanningstepper) that, as the exposure apparatus EX, synchronously moves themask M and the substrate P in respective scanning directions that aremutually different directions (opposite directions) while exposing thepattern formed on the mask M onto the substrate P. In the followingexplanation, the direction that matches the optical axis AX of theprojection optical system PL is the Z axis direction, the synchronousmovement direction (scanning direction) of the mask M and the substrateP within a plane perpendicular to the Z axis direction is the X axisdirection, and the direction (non-scanning direction) perpendicular tothe Z axis direction and the X axis direction is the Y axis direction.In addition, the rotation (tilting) directions around the X axis, Y axisand Z axis are the θX, θY and θZ directions respectively. Note that the“substrate” mentioned here includes substrates obtained by coating asemiconductor wafer with a photoresist as a photosensitive material, andthe “mask” includes reticles formed with a device pattern to besubjected to the reduction projection onto the substrate.

The illumination optical system IL is used so that the mask M, which issupported on the mask stage MST, is illuminated with the exposure lightbeam EL. The illumination optical system IL includes an exposure lightsource, an optical integrator which uniformizes the illuminance of thelight flux radiated from the exposure light source, a condenser lenswhich collects the exposure light beam EL come from the opticalintegrator, a relay lens system, a variable field diaphragm which setsthe illumination area on the mask M illuminated with the exposure lightbeam EL to be slit-shaped, and the like. The predetermined illuminationarea on the mask M is illuminated with the exposure light beam EL havinga uniform illuminance distribution by the illumination optical systemIL. Those usable as the exposure light beam EL radiated from theillumination optical system IL include emission lines (g-ray, h-ray,i-ray) in the ultraviolet region radiated, for example, from a mercurylamp, far ultraviolet light beams (DUV light beams) such as the KrFexcimer laser beam (wavelength: 248 nm), and vacuum ultraviolet lightbeams (VUV light beams) such as the ArF excimer laser beam (wavelength:193 nm) and the F₂ laser beam (wavelength: 157 nm). In this embodiment,the ArF excimer laser beam is used.

The mask stage MST supports the mask M. The mask stage MST istwo-dimensionally movable in the plane perpendicular to the optical axisAX of the projection optical system PL, i.e., in the XY plane, and it isfinely rotatable in the θZ direction. The mask stage MST is driven by amask stage-driving unit MSTD such as a linear motor. The maskstage-driving unit MSTD is controlled by the control unit CONT. Amovement mirror 50 is provided on the mask stage MST. A laserinterferometer 51 is provided at a position opposed to the movementmirror 50. The position in the two-dimensional direction and the angleof rotation of the mask M on the mask stage MST are measured inreal-time by the laser interferometer 51. The result of the measurementis outputted to the control unit CONT. The control unit CONT drives themask stage-driving unit MSTD on the basis of the result of themeasurement obtained by the laser interferometer 51 to thereby positionthe mask M supported on the mask stage MST.

The projection optical system PL projection-exposes the pattern on themask M onto the substrate P at a predetermined projection magnificationβ. The projection optical system PL is constituted by a plurality ofoptical elements including the optical element (lens) 2 provided at theterminating end portion on the side of the substrate P. The opticalelements are supported by a barrel PK. In this embodiment, theprojection optical system PL is the reduction system having theprojection magnification 3 which is, for example, ¼ or ⅕. The projectionoptical system PL may be any one of the lx magnification system and themagnifying system. The optical element 2, which is disposed at the endportion of the projection optical system PL of this embodiment, isprovided detachably (exchangeably) with respect to the barrel PK. Theliquid 1 in the liquid immersion area AR2 makes contact with the opticalelement 2.

In this embodiment, pure water is used for the liquid 1. Those capableof being transmitted through pure water include the ArF excimer laserbeam as well as the emission line (g-ray, h-ray, i-ray) in theultraviolet region radiated, for example, from a mercury lamp and thefar ultraviolet light beam (DUV light beam) such as the KrF excimerlaser beam (wavelength: 248 nm).

The optical element 2 is formed of fluorite. Fluorite has a highaffinity for water. Therefore, the liquid 1 is successfully allowed tomake tight contact with substantially the entire surface of the liquidcontact surface 2 a of the optical element 2. That is, in thisembodiment, the liquid (water) 1, which has the high affinity for theliquid contact surface 2 a of the optical element 2, is supplied.Therefore, the highly tight contact is effected between the liquid 1 andthe liquid contact surface 2 a of the optical element 2. The opticalpath between the optical element 2 and the substrate P can be reliablyfilled with the liquid 1. The optical element 2 may be formed of quartz(silica) having a high affinity for water. A water-attracting (lyophilicor liquid affinity) treatment may be applied to the liquid contactsurface 2 a of the optical element 2 to further enhance the affinity forthe liquid 1.

The substrate stage PST supports the substrate P. The substrate stagePST includes a Z stage 52 which holds the substrate P by the aid of asubstrate holder, an XY stage 53 which supports the Z stage 52, and abase 54 which supports the XY stage 53. The substrate stage PST isdriven by a substrate stage-driving unit PSTD such as a linear motor.The substrate stage-driving unit PSTD is controlled by the control unitCONT. By driving the Z stage 52, the substrate P, which is held on the Zstage 52, is subjected to the control of the position (focus position)in the Z axis direction and the positions in the θX and θY directions.By driving the XY stage 53, the substrate P is subjected to the controlof the position in the XY directions (position in the directionssubstantially parallel to the image plane of the projection opticalsystem PL). That is, the Z stage 52 controls the focus position and theangle of inclination of the substrate P so that the surface of thesubstrate P is adjusted to match the image plane of the projectionoptical system PL in the auto-focus manner and the auto-leveling manner.The XY stage 53 positions the substrate P in the X axis direction andthe Y axis direction. It goes without saying that the Z stage and the XYstage may be provided as an integrated body.

A movement mirror 55, which is movable together with the substrate stagePST with respect to the projection optical system PL, is provided on thesubstrate stage PST (Z stage 52). A laser interferometer 56 is providedat a position opposed to the movement mirror 55. The angle of rotationand the position in the two-dimensional direction of the substrate P onthe substrate stage PST are measured in real-time by the laserinterferometer 56. The result of the measurement is outputted to thecontrol unit CONT. The control unit CONT drives the substratestage-driving unit PSTD on the basis of the result of the measurement ofthe laser interferometer 56 to thereby position the substrate Psupported on the substrate stage PST.

An auxiliary plate 57 is provided on the substrate stage PST (Z stage52) so that the substrate P is surrounded thereby. The auxiliary plate57 has a flat surface which has approximately the same height as that ofthe surface of the substrate P held by the substrate holder. In thisarrangement, a gap of about 0.1 to 2 mm is provided between theauxiliary plate 57 and the edge of the substrate P. However, the liquid1 scarcely flows into the gap owing to the surface tension of the liquid1. Even when the vicinity of the circumferential edge of the substrate Pis subjected to the exposure, the liquid 1 can be retained under theprojection optical system PL by the aid of the auxiliary plate 57.

The liquid supply mechanism 10 supplies the prescribed liquid 1 onto thesubstrate P, and it is provided with a first liquid supply portion 11and a second liquid supply portion 12 that are able to deliver theliquid 1 and a first and second supply tube 11A, 12A that respectivelyconnect one end portion thereof to the first and second liquid supplyportions 11, 12. The first and second liquid supply portions 11, 12 arerespectively provided with a tank that accommodates the liquid 1, apressurizing pump, etc.

The liquid recovery mechanism 20 recovers the liquid 1 on the surface ofthe substrate P, and it is provided with a liquid recovery portion 21that is able to recover the liquid 1 and recovery tubes 22 (firstthrough fourth recovery tubes 22A to 22D) that connect one end portionthereof to the liquid recovery portion 21. The liquid recovery portion21 is provided with a suction apparatus (vacuum system) such as a vacuumpump and a tank that accommodates the recovered liquid 1.

A channel formation member 30 is arranged in the vicinity of the opticalelement 2 of the terminating end portion of the projection opticalsystem PL.

The channel formation member 30 is a ring-shaped member provided so asto surround the optical element 2, and it is provided with a firstsupply port 13 and a second supply port 14 arranged to oppose thesurface of the substrate P. In addition, the channel formation member 30has supply channels 82 (82A, 82B) in the interior thereof. One endportion of the supply channel 82A is connected to the first supply port13, and the other end portion is connected to the liquid supply portion11 via the first supply tube 11A. One end portion of the supply channel82B is connected to the second supply port 14, and the other end portionis connected to the second liquid supply portion 12 via the secondsupply tube 12A. In addition, the channel formation member 30 isprovided with a recovery port 23 arranged to oppose the surface of thesubstrate P. In this embodiment, the channel formation member 30 hasfour recovery ports 23A to 23D. In addition, the channel formationmember 30 has recovery channels 84 (84A to 84D) that correspond to therecovery port 23 (23A to 23D) in the interior thereof. One end portionof the recovery channels 84A to 84D is respectively connected to therecovery ports 23A to 23D, and the other end portion is respectivelyconnected to the liquid recovery portion 21 via the recovery tubes 22Ato 22D. In this embodiment, the channel formation member 30 comprisesthe respective portions of the liquid supply mechanism 10 and the liquidrecovery mechanism 20.

Note that, in this embodiment, the first through fourth recovery tubes22A to 22D are connected to one liquid recovery portion 21, but aplurality (four, here) of the liquid recovery portions 21 thatcorrespond to the number of recovery tubes may be provided, and therespective first through fourth recovery tubes 22A to 22D may berespectively connected to the aforementioned plurality of liquidrecovery portions 21.

The liquid supply operations of the first and second liquid supplyportions 11, 12 are controlled by the control apparatus CONT. Thecontrol apparatus CONT is capable of respectively independent control ofthe liquid supply volume per unit time onto the substrate P from thefirst and second liquid supply portions 11, 12. The liquid 1 that isdelivered from the first and second liquid supply portions 11, 12 issupplied onto the substrate P from the supply ports 13, 14 via thesupply tubes 11A, 12A and the supply channels 82A, 82B of the channelformation member 30. In addition, the liquid recovery operation of theliquid recovery portion 21 is controlled by the control apparatus CONT.The control apparatus CONT is able to control the liquid recovery volumeper unit time by the liquid recovery portion 21. The liquid 1 on thesubstrate P that has been recovered from the recovery port 23 isrecovered by the liquid recovery portion 21 via the recovery channel 84and the recovery tube 22 of the channel formation member 30.

A liquid trap surface 70 of a prescribed length that catches the liquid1 unsuccessfully recovered by the recovery port 23 is formed on thelower surface (surface that faces the substrate P side) of the channelformation member 30 outside from the recovery port 23 with respect tothe projection optical system PL. The trap surface 70 is inclined withrespect to the XY plane, and is inclined to make separation from thesurface of the substrate P (to be directed upwardly) at outer positionswith respect to the projection area AR1 (liquid immersion area AR2).Lyophilic treatment (liquid-attracting treatment) is implemented on thetrap surface 70. The film (resist, reflection prevention film, etc.)that is coated on the surface of the substrate P is normallywater-repellent, so the liquid 1 that flows to the outside of therecovery port 23 is captured by the trap surface 70 and is ultimatelyrecovered by the recovery port 23. Note that the liquid 1 in thisembodiment is water that has a large polarity, so it is possible to givehydrophilic properties to the trap surface 70 by forming a thin filmusing a substance with a molecular structure that has a large polarity,such as alcohol, for example as the lyophilic treatment (hydrophilictreatment) for the trap surface 70.

Specifically, in the case where water is used as the liquid 1, treatmentin which a substance with a molecular structure that has a largepolarity, such as an OH group, is arranged on the trap surface 70 ispreferable.

FIG. 2 is a plan view that shows the positional relationship between theprojection region AR1 of the projection optical system PL and the firstand second supply ports 13, 14 and first through fourth recovery ports23A to 23D formed on the channel formation member 30.

In FIG. 2, the projection region AR1 of the projection optical system PLis set to a rectangular shape with the Y axis direction (thenon-scanning direction) as the lengthwise direction, and a liquidimmersion region AR2 that has been filled with liquid 1 is within aregion including the projection region AR1 surrounded effectively byfour recovery ports, and it is formed on a portion of the substrate P.The first supply port 13 is provided at one side (−X side) of thescanning direction with respect to the projection region AR1, and thesecond supply port 14 is provided on the other side (+X side). That is,the first and second recovery ports 13, 14 are arranged on both sides ofthe projection region AR1 in relation to the scanning direction (Xdirection) so as to interpose it. The respective first and second supplyports 13, 14 are formed as slits that are approximately arc-shaped in aplanar view and that have specified lengths. The lengths in the Y axisdirection of the first and second supply ports 13, 14 is at least longerthan the length of the projection region AR1 in the Y axis direction.The liquid supply mechanism 10 is able to simultaneously supply liquid 1on both sides of the projection region AR1 using the first and secondsupply ports 13, 14.

The first through fourth recovery ports 23A to 23D are arranged tosurround the supply ports 13, 14 and projection region AR1. Of theplurality (four) of recovery ports 23A to 23D, the first recovery port23A and the third recovery port 23C are arranged on both sides of theprojection region AR1 in relation to the X axis direction to interposeit, and the second recovery port 23B and the fourth recovery port 23Dare arranged on both sides of the projection region AR1 in relation tothe Y axis direction to interpose it. The supply ports 13, 14 have aconfiguration in which they are arranged between the projection regionAR1 and recovery ports 23A and 23C. The respective recovery ports 23A to23D are formed in a slit shape that has a prescribed length and isapproximately arc-shaped in a planar view. The length of recovery ports23A and 23C in the Y axis direction is longer than the length of thesupply ports 13, 14 in the Y axis direction. The respective recoveryports 23B and 23D are also formed to be nearly the same length asrecovery ports 23A and 23C. The first through fourth recovery ports 23Ato 23D are connected to the liquid recovery portion 21 via the firstthrough fourth recovery tubes 22A to 22D respectively.

Note that, in this embodiment, the plurality of respective recoveryports 23A to 23D are formed to be nearly the same size (length), butthey may also be mutually different sizes. In addition, the number ofrecovery ports 23 is not limited to four, and they may be plurallyprovided in any number as long as they are arranged to surround theprojection region AR1 and the supply ports 13, 14.

FIG. 3 is a schematic oblique view of the channel formation member 30.

As shown in FIG. 3, the channel formation member 30 is a ring-shapedmember provided to enclose the optical element 2 of the tip portion ofthe projection optical system PL, and it is provided with a first member31, a second member 32 that is arranged on the upper portion of thefirst member 31, and a third member 33 that is arranged on the upperportion of the second member 32. The respective first through thirdmembers 31 to 33 that constitute the channel formation member 30 areplate-shaped members and have respective hole portions 31A to 33A thatare able to arrange the projection optical system PL (optical element 2)at the center portion thereof. One end portion of first and secondsupply tubes 11A and 12A is connected to first and second liquid supplyportions 11 and 12 respectively, and the other end portion is connectedto the supply channel 82 formed inside the channel formation member 30.One end portion of first through fourth recovery tubes 22A to 22D isconnected to the liquid recovery portion 21, and the other end portionis connected to the recovery channel 84 formed inside the channelformation member 30.

FIG. 4 is an oblique view that shows the first member 31 arranged at thelowest level among the first through third members.

The first member 31 is provided with a first supply port 13 that isformed on the −X side of the projection optical system PL and suppliesliquid 1 to the substrate P and a second supply port 14 that is formedon the +X side of the projection optical system PL and supplies liquidonto the substrate P. The respective first supply port 13 and secondsupply port 14 are through holes that pass through the first member 31,and that are formed to be approximately arc-shaped in a planar view. Inaddition, the first member 31 is provided with a first recovery port 23Athat is formed on the −X side of the projection optical system PL andrecovers liquid on the substrate P, a second recovery port 23B that isformed on the −Y side of the projection optical system PL and recoversthe liquid on the substrate P, a third recovery port 23C that is formedon the +X side of the projection optical system PL and recovers theliquid on the substrate P, and a fourth recovery port 23D that is formedon the +Y side of the projection optical system PL and recovers theliquid on the substrate P.

The respective first through fourth recovery ports 23A to 23D are alsothrough holes that pass through the first member 31, formed to beapproximately arc-shaped in a planar view, and provided at approximatelyequal intervals along the perimeter of the projection optical system PL.In addition the respective recovery ports 23A to 23D are providedfurther outside the projection optical system PL than the supply ports13, 14. They are provided so that the separation distance of supplyports 13 and 14 with the substrate P and the separation distance ofrecovery ports 23A to 23D with the substrate P are nearly the same.Specifically, the height position of the supply ports 13, 14 and theheight position of the recovery ports 23A to 23D are set to be nearlythe same.

FIG. 5A and FIG. 5B are oblique views that show the second member 32arranged at the middle level among the first through third members,where FIG. 5A is an oblique view as seen from the upper side, and FIG.5B is an oblique view as seen from the lower side.

The other end portion of the first and second supply tubes 11A, 12A andthe other end portion of the first through fourth recovery tubes 22A to22D are connected to the second member 32 by means of couplers 80, 81.The second member 32 is provided with a first supply hole portion 15that is formed on the −X side of the projection optical system PL andconnects to the first supply port 13 of the first member 31 and a secondsupply hole portion 16 that is formed on the +X side of the projectionoptical system PL and connects to the second supply port 14 of the firstmember 31. The first and second supply hole portions 15, 16 are throughholes, where the shape and size in a planar view correspond to the firstand second supply ports 13, 14. Specifically, the first and secondsupply hole portions 15, 16 are slit-shaped channels that have an arcshape in a planar view.

In addition, a tapered groove portion 17 that is connected to the firstsupply portion 11A via a tube-shaped connection hole 41A is formed onthe −X side of the projection optical system PL of the upper surface 32Sof the second member 32. The tapered groove portion 17 is formed togradually expand in the horizontal direction from the connection portionwith the first supply tube 11A (connection hole 41A) toward theprojection optical system PL side (first supply hole portion 15 side),and the length of the wide portion thereof in relation to the Y axisdirection and the length of the first supply hole portion 15 are nearlythe same. Also, a bank portion 43 is provided between the tapered grooveportion 17 and the first supply hole portion 15. The bank portion 43 isa protrusion portion that is lower than the upper surface 32S of thesecond member 32 and higher than the tapered groove portion 17, and thelength thereof in the Y axis direction is nearly the same as the lengthof the first supply hole portion 15 (first supply port 13). In the sameway, a tapered groove portion 18 that connects with the second supplytube 12A via a connection hole 41B is formed on the +X side of theprojection optical system PL of the upper surface of the second member32. The tapered groove portion 18 is formed to gradually expand in thehorizontal direction from the connection portion with the second supplytube 12A (connection hole 41B) toward the projection optical system PLside (second supply hole portion 16 side), and the length in the Y axisdirection of the wide portion thereof is nearly the same as the lengthof the second supply hole portion 16. Also, a bank portion 44 isprovided between tapered groove portion 18 and the second supply holeportion 16. The bank portion 44 is a protrusion portion that is lowerthan the upper surface 32S of the second member 32 and higher thantapered groove portion 18, and the length thereof in the Y axisdirection is nearly the same as the length of the second supply holeportion 16 (second supply port 14). By connecting the first member 31and the second member 32, the first and second supply holes 13, 14formed on the first member 31 and the first and second supply holeportions 15, 16 formed on the second member 32 are respectivelyconnected.

A tapered groove portion 45 that is connected to the first recoveryportion 22A via a tube-shaped connection hole 42A is formed on the −Xside of the projection optical system PL of the lower surface 32D of thesecond member 32. Tapered groove portion 45 is formed to graduallyexpand in the horizontal direction from the connection portion with thefirst recovery tube 22A toward the projection optical system PL side,and the length of the wide portion thereof in relation to the Y axisdirection and the length of the first recovery port 23A of the firstmember 31 are nearly the same. Also, when the first member 31 and thesecond member 32 are connected, the wide portion of tapered grooveportion 45 and the first recovery port 23A are connected. A taperedgroove portion 46 that connects with the second recovery tube 22B via aconnection hole 42B is formed on the −Y side of the projection opticalsystem PL, and it is formed to gradually expand in the horizontaldirection from the connection portion with the second recovery tube 22Btoward the projection optical system PL side. In addition, it is suchthat the wide portion of tapered groove portion 46 is connected with thesecond recovery port 23B of the first member 31. In the same way,tapered groove portions 47 and 48 that connect with third and fourthrecovery tubes 22C and 22D via connection holes 42C and 42D arerespectively formed on the +X side and the +Y side of the projectionoptical system PL, and they are formed to gradually expand in thehorizontal direction from the connection portion with the third andfourth recovery tubes 22C, 22D toward the projection optical system PLside. In addition, they are such that the wide portion of the taperedgroove portions 47, 48 and the third and fourth recovery ports 23C, 23Dof the first member 31 are connected.

FIG. 6 is a drawing that shows the third member 33.

The lower surface of the third member 33 is a flat surface. When thesecond member 32 and the third member 33 are connected, the uppersurface 32S of the second member 32 and the lower surface of the thirdmember 33 come into contact. The bank portions 43, 44 are lower than theupper surface 32S, so they do not come into contact with the lowersurface of the third member 33.

Note that, in this embodiment, the channel formation member 30 is formedusing three members, but the number of members is not limited thereto.In addition, the channel to the supply ports 13, 14 and the channel tothe recovery ports 23A, 23B, 23C, 23D may be selectively formed on eachof the respective members, and channels may be formed on separatemembers for each port.

FIG. 7 is a cross-sectional diagram at the A-A arrow of FIG. 3, and FIG.8 is a cross-sectional diagram at the B-B arrow of FIG. 3.

Note that, the following explanation is with respect to the supplychannel 82B (82) and the circuit channel 84C (84) provided on the +Xside of the projection optical system PL of the channel formation member30, but the supply channel 82A provided on the −X side of the projectionoptical system PL, the recovery channel 82A of the −X side of theprojection optical system PL, the recovery channel 82B of the −Y sideand the recovery channel 82D of the +Y side also have an equivalentconfiguration.

In FIG. 7, the supply channel 82B is provided with a connection hole 41Bin which one end portion thereof connects to the supply tube 12A via acoupler 80, and the other end portion is connected to tapered grooveportion 18, a buffer space portion 90 formed between the tapered grooveportion 18 and the third member 33, a narrow channel portion 91 formedbetween the bank portion 44 and the third member 33 and that is narrowerthan the buffer space portion 90, and a supply hole portion 16 whose topend portion connects to the narrow channel portion 91 and whose lowerend portion connects to supply port 14. The buffer space portion 90forms a relatively wide channel. In the buffer space portion 90 and thenarrow channel portion 91, the liquid 1 flows in a nearly horizontaldirection (XY plane direction), and, in the supply hole portion 16, theliquid 1 flows in a nearly vertical direction (−Z direction).Specifically, the supply channel 82B has a corner portion 92 on itspath, and the narrow channel portion 91 has a configuration in which itis provided in the vicinity of (immediately before) that corner portion92.

The narrow channel portion 91 is provided further on the channeldownstream side than the buffer space portion 90. Specifically, thenarrow channel portion 91 in the vicinity of the corner portion 92 has aconfiguration that is narrower than the buffer space portion 90, whichis the channel in front thereof. In this embodiment, the narrow channelportion 91 is formed between the bank portion 44 that protruded upwardfrom the second member 32 and the third member 33 and is narrowed in thevertical direction with respect to the buffer space portion 90.

The liquid 1 that is sent from the liquid supply portion 12 flows to theconnection hole 41B of the supply channel 82B via a supply tube 12A.After the liquid 1 flows through the buffer space portion 90 in a nearlythe horizontal direction and flows through the narrow channel portion91, it changes direction to the substrate P side at the corner portion92, and it is supplied onto the substrate P from supply port 14 via asupply hole portion 16.

On the other hand, a recovery channel 84C has a buffer space portion 94,one end portion of which is connected to a recovery port 23C and theother end portion of which is connected to a connection hole 42C.Through the driving of the liquid recovery portion 21 that has a vacuumpump, the liquid 1 on the substrate P flows upward in the verticaldirection (+Z direction) to the recovery channel 84C via recovery port23C. At this time, along with the liquid 1 on the substrate P, gas (air)in the vicinity thereof also flows (is recovered) from recovery port23C. The direction of the liquid 1 that has flowed into the recoverychannel 84C is changed to the horizontal direction on the side of theone end portion of the buffer space portion 94, and it flows through thebuffer space portion 94 in a nearly horizontal direction. After that, itflows through the connection hole 42C and is sent to the liquid recoveryportion 21 via a recovery tube 22C.

The first through third members 31 to 33 are formed of a metal such asstainless steel, titanium, aluminum or an alloy that contains these, andthe hole portion and the groove portion of the respective members 31 to33 are formed by discharge processing, for example. After the processfor the respective members 31 to 33 by discharge processing, a channelformation member 30 is formed by joining these respective members 31 to33 using a bonding agent, a joint member or the like. Note that theliquid contact surface of the first through third members 31 to 33 mayhave electrolytic polishing or non-conductor oxidation film treatment orboth implemented. By joining the respective members 31 to 33, a supplychannel 82B (82), which includes a buffer space portion 90 and a narrowchannel portion 91, and a recovery channel 84C (84), which includes abuffer space portion 94, are formed. Note that the respective membersconstituting a liquid supply mechanism 10 and liquid recovery mechanism20 including the channel formation member 30 may be formed by asynthetic resin such as polytetrafluorethylene.

A minute gap 100 is formed between the inner side surface 30T of thechannel formation member 30, which constitutes a portion of the liquidsupply mechanism 10 and the liquid recovery mechanism 20, and the sidesurface 2T of the optical element 2 of the terminating end portion,which comes into contact with the liquid 1, of the projection opticalsystem PL. The minute gap 100 is provided to vibrationally separate theoptical element 2 of the projection optical system PL and the channelformation member 30, and, with the aid of the minute gap 100, thevibration generated in the liquid supply mechanism 10 and the liquidrecovery mechanism 20 can be prevented from being transmitted to theprojection optical system PL. The minute gap 100 is formed small enoughto cause a liquid 1 permeation phenomenon in order to bring theprojection region AR1 and the supply port 14 as close together aspossible, and the minute gap 100 is connected with the gas space in thevicinity of the channel formation member 30. The liquid supply mechanism10 and the liquid recovery mechanism 20 that include the channelformation member 30 are respectively supported by a support membersother than the projection optical system PL and the support members thatsupport this projection optical system PL.

Liquid repellence (water repellence) treatment is performed on both theinner side surface 30T of the channel formation member 30 and the sidesurface 2T of the optical member 2, which form the minute gap 100. Theliquid repellence treatment portions 101A, 101B where the liquidrepellence treatment is performed are provided at a portion that isseparated from the lower end portion of the minute gap 100 that comesinto contact with the liquid 1. The size (distance in the Z axisdirection) of the non-liquid repellence treatment portions 102A, 102Bbetween the lower end portion of the minute gap 100 and the liquidrepellence treatment portions 101A, 101B of the inner side surface 30Tof the channel formation member 30 and the side surface 2T of theoptical element 2 is set to be nearly the same as the distance(so-called working distance) between the projection optical system PLand the substrate P, for example. Note that, in the example shown inFIG. 7 and FIG. 8, liquid repellence treatment portion 101A is providedon nearly the entire surface of the side surface 2T of the opticalelement 2 with the exception of the vicinity of the lower end portion ofthe minute gap 100, but it may also be a configuration in which theportion 101A is provided on a portion thereof, and it may be aconfiguration in which the portion 101A is provided discontinuously (inan island shape). Similarly, in stead of a configuration in which liquidrepellence treatment portion 101B is provided on nearly the entiresurface of the inner side surface 30T of the channel formation member 30with the exception of the vicinity of the lower end portion of theminute gap 100, there may also be a configuration in which it isprovided on a portion thereof.

An example of liquid repellence treatment is a coating treatment using amaterial that has liquid repellent properties. Examples of materialsthat have liquid repellent properties are a fluorocarbon compound, asilicon compound or a synthetic resin such as polyethylene. In addition,the thin film for surface treatment may be a single layer film, and itmay also be a film consisting of a plurality of layers.

Note that the liquid 1 contact angle at the liquid repellent surface ofthe inner side surface 30T of the channel formation member 30 and theside surface 2T of the optical element 2 is 70 degrees or more, andpreferably 90 degrees or more.

FIG. 9 is a principal parts enlarged drawing of the liquid recoveryportion 21.

Provided on the liquid recovery portion 21 are a gas-liquid separator 60connected to recovery tube 22 and a vacuum system 68 that is connectedto that gas-liquid separator 60 via a discharge tube 69 and that has amass flow controller, a vacuum pump, and the like. Here, as describedabove, in addition to the liquid 1 on the substrate P, the surroundinggas is also recovered from recovery port 23. The gas-liquid separator 60separates the liquid and gas recovered from recovery port 23. Thegas-liquid separator 60 is provided with a tank 61 and a separation tube62 that is provided inside the tank 61 and connects with recovery tube22. The upper part of the tank 61 is connected to the vacuum system 68,and a discharge tube portion 63 is provided on the lower portion of thetank 61. A valve 64 that opens and closes the channel of the dischargetube portion 63 is provided on this discharge tube portion 63.

Note that the separator 60 may be provided on the plurality of therespective first through fourth recovery tubes 22A to 22D, or, it may bea configuration in which the plurality of the first through fourthrecovery tubes 22A to 22D are assembled, the separator 60 is provided onthis assembled tube.

FIG. 10 is an enlarged drawing of the separator tube 62 as seen from thebottom.

As shown in FIG. 10, the separator tube 62 is bent in a vortex shape(spiral shape), and a plurality of slit-shaped hole portions 65 areformed at prescribed intervals on the lower surface thereof. Therefore,when the vacuum system 68 is driven, a negative pressure is applied tothe tank 61 and the recovery tube 22, and the liquid 1 on the substrateP is recovered along with the gas in the vicinity thereof via recoveryport 23. The liquid and gas recovered from recovery port 23 flow intothe separator tube 62 provided within the tank 61 via the recovery tube22. By flowing through the separator tube 62, the liquid 1 drops via thehole portion 65 due to gravitational action and is colleted in the lowerportion of the tank 61. Note that by operating valve 64 to open thedischarge tube portion 63, the liquid 1 that has collected in the tank61 can be discharged to the outside. On the other hand, the gas issucked in by a vacuum system 68 via the discharge tube 69 connected tothe upper portion of the tank 61. In this way, by separating the liquidand the gas recovered by means of the gas-liquid separator 60, liquid 1does not flow into the vacuum system 68 that has a vacuum pump, etc., soit is possible to prevent inconvenience such as the malfunction of thatvacuum pump. Note that the vacuum system of the plant in which theexposure apparatus EX is installed may be used without providing avacuum pump on the vacuum system 68.

Next, a method in which the aforementioned exposure apparatus EX is usedto expose the image of the pattern on the mask M onto the substrate Pwill be explained.

Here, the exposure apparatus EX in this embodiment projection-exposesthe pattern image of the mask M on the substrate P while moving the maskM and the substrate P in the X axis direction (scanning direction).During scanning exposure, the pattern image of a portion of the mask Mis projected onto the rectangular projection region AR1 under the tipportion of the projection optical system PL, and in synchronization withthe mask M moving in the −X direction (or the +X direction) at avelocity V with respect to the projection optical system PL, thesubstrate P moves in the +X direction (or the −X direction) at avelocity β·V (where β is the projection magnification) by means of theXY stage 53. A plurality of shot regions are set on the substrate, andafter exposure to one shot region has been completed, the next shotregion moves to the scanning start position by means of the steppingmovement of the substrate P. Thereafter the scanning exposure processfor the respective shot regions is sequentially performed while movingthe substrate P by a step and scan system.

When the scanning exposure process is performed, the control apparatusCONT drives the liquid supply mechanism 10 and starts the operation ofliquid supply onto the substrate P. The liquid 1 that is respectivelysent from the first and second liquid supply portions 11, 12 of theliquid supply mechanism 10 is supplied onto the substrate P via supplychannels 82A, 82B formed within the channel formation member 30 afterflowing through the supply tubes 11 A, 12A.

For example, the liquid 1 sent from the second liquid supply portion 12expands, after flowing through the second supply tube 12A, in thehorizontal direction (Y axis direction) by flowing through the bufferspace portion 90 formed so that it gradually widens in the horizontaldirection. Here, because the bank portion 44 is formed on the channeldownstream side of the buffer space portion 90, the liquid 1 that hasbeen sent from the second liquid supply portion 12 is reserved for atime in the buffer space portion 90. The liquid 1 flows to the supplyhole portion 16 via the narrow channel portion 91 after a prescribedamount or more has reserved in the buffer space portion 90 (after thelevel of the liquid 1 has reached at least the height of the bankportion 44). In this way the supply of liquid 1 to supply port 14 isstarted. Through this, the liquid 1 that has flowed out from the bufferspace portion 90 is supplied nearly uniformly onto the substrate P fromthe slit-shaped supply port 14, which has the Y axis direction as thelengthwise direction. That is, if the narrow channel 91 (the bankportion 44) is not formed, the flow volume of the liquid 1 that hasflowed through tapered groove portion 18 would be such that the centerportion of the width direction of tapered groove portion 18 is largerthan that of the end portion, so there would be cases in which theliquid supply volume going onto the substrate P becomes non-uniform atthe respective positions of the supply port 14, which has the Y axisdirection as the lengthwise direction. However, by providing the narrowchannel 91 so that the supply of liquid to the supply port 14 startsafter the prescribed volume or more of liquid 1 is reserved, the liquid1 is supplied onto the substrate P at a nearly uniform liquid supplyvolume at the respective positions of the approximately arc-shapedsupply port 14, which has the Y axis direction as the lengthwisedirection. Similarly, the supply of the liquid 1 that has been sent outfrom the first liquid supply portion 11 to the supply port 13 is alsostarted after a prescribed amount or more has reserved in the bufferspace portion 90, so it is supplied nearly uniformly onto the substrateP from the slit-shaped supply port 13. In addition, even after the startof the supply from the supply ports 13, 14, the liquid 1 continues toflow to the supply ports 13, 14 via the buffer space portion 90, so itis possible to continue the supply of liquid onto the substrate P at auniform volume at the respective positions of the supply ports 13, 14.

Here, bubbles tend to remain, for example, at the start of supply, inthe vicinity of the corner portion 92 of the supply channel 82B (82A),but by narrowing the supply channel 82B in the vicinity of this cornerportion 92, the liquid 1 that flows through the narrow flow portion 91can be made to flow at a high rate, and the bubbles can be discharged tooutside the supply channel 82B via supply port 14 by means of thisliquid 1 that has been made to flow at high rate. Then, by implementingthe liquid immersion exposure operation after the bubbles have beendischarged, exposure processing can be performed in a status in whichthere are no bubbles in the liquid immersion region AR2.

In this embodiment, the liquid mechanism 10 simultaneously performssupply of liquid 1 onto the substrate P from both sides of theprojection region AR1 from the supply ports 13, 14. Through this, theliquid 1 that is supplied onto the substrate P from the supply ports 13,14 expands to wet well between the substrate P and the lower end surfaceof the optical element 2 of the terminating end portion of theprojection optical system PL, and the liquid immersion region AR2 isformed in a range that is at least wider than the projection region AR1.

In addition, the control apparatus CONT drives the liquid recoveryportion 21 of the liquid recovery mechanism 20 and performs the recoveryoperation of the liquid on the substrate P in parallel with the supplyoperation of the liquid 1 by the liquid supply mechanism 10. Throughthis, the liquid 1 on the substrate P that flows to the outside withrespect to the projection region AR1 from the supply ports 13, 14 isrecovered from the recovery ports 23A to 23D. Since a portion of therecovery channel 84 (84A to 84D) is also buffer space portion 94 inwhich an end portion thereof has nearly the same length as the Y axisdirection of the recovery port (23A to 23D) and which is formed in atapered manner that gradually becomes smaller toward recovery tube 22,it is possible to recover the liquid 1 on the substrate P at a nearlyuniform liquid recovery volume at the respective positions of recoveryport 23.

While the control apparatus CONT performs the recovery of the liquid 1on the substrate P in parallel with the supply of liquid 1 to thesurface of the substrate P by means of the liquid supply mechanism 10and the liquid recovery mechanism 20 as it moves the substrate stage PSTthat supports the substrate P in the X axis direction (scanningdirection), it projection-exposes the pattern image of the mask M ontothe substrate P via the projection optical system PL and the liquid 1between the projection optical system PL and the substrate P.

At this time, the liquid supply mechanism 10 simultaneously performs thesupply of the liquid 1 from both sides of the projection region AR1 inrelation to the scanning direction via the supply ports 13, 14, so theliquid immersion region AR2 is formed uniformly and well. In addition,the liquid recovery mechanism 20 simultaneously performs the recovery ofthe liquid 1 at a plurality of positions in the surrounding area of theprojection region AR1 including both sides of the scanning direction ofthe projection region AR1 via the plurality of recovery ports 23A to 23Dthat surround the projection region AR1, so it prevents scattering andoutflow of the liquid 1 to the surroundings of the substrate P.

Note that, in this embodiment, when liquid 1 is supplied to thesubstrate P from both sides of the scanning direction of the projectionregion AR1, the control apparatus CONT controls the liquid supplyoperation of the first and second liquid supply portions 11, 12 of theliquid supply mechanism 10 so that, in relation to the scanningdirection, the supply volume per unit time supplied from in front of theprojection region AR1 is higher than the supply volume of liquidsupplied at the opposite side thereof. For example, in the case whereexposure processing is performed while moving the substrate P in the +Xdirection, the control apparatus CONT makes the liquid volume from the−X side (that is, from the supply port 13) larger than the liquid volumefrom the +X side (that is, from the supply port 14). On the other hand,in the case where exposure processing is performed while moving thesubstrate P in the −X direction, it makes the liquid volume from the +Xside larger than the liquid volume from the −X side with respect to theprojection region AR1. Here, there are cases in which, for example, dueto the substrate P moving in the +X direction, the liquid volume thatmoves to the +X side with respect to the projection region AR1increases, and the recovery port 23C, which is provided at a liquidrecovery position on the +X side, cannot recover all of the liquid 1. Inany case, the liquid 1 unsuccessfully recovered by the +X side recoveryport 23C is captured at the trap surface 70 provided on the +X side ofthe liquid recovery position, so it does not flow out and is notdispersed around the substrate P, etc.

In addition, as described above, because the minute gap 100 is providedbetween the channel formation member 30 and the optical element 2, theinconvenience in which the vibration produced by the liquid supplymechanism 10 and the liquid recovery mechanism 20 is transmitted to theprojection optical system PL is prevented. However, when this gap is toolarge, it leads to the entire apparatus becoming larger. In addition,since the supply ports and the recovery ports of the liquid 1 areprovided at positions that are away from the projection region AR1,there is a possibility that the liquid immersion region AR2 will not beformed well so that it includes the projection region AR1, and theinconvenience of an increase in the amount of liquid used also occurs.Also, due to that large gap, there is a possibility that mixing in ofgas (bubbles) to the liquid immersion region AR2 will occur. Therefore,in this embodiment, the minute gap 100 is provided at a size at whichthe phenomenon of penetration or permeation of the liquid 1 will becaused. Through this, while it is possible to prevent the apparatus frombecoming larger, it is also possible to prevent the inconveniencewhereby gas gets into the liquid immersion region AR2 from the gap. Onthe other hand, in the case where liquid 1 has penetrated into theminute gap 100, the penetrated liquid 1 goes into a stagnant status, sothe degree of cleanliness drops, and there is a possibility of theoccurrence of the inconvenience whereby that liquid 1 of the minute gap100, whose degree of cleanliness has dropped, becomes mixed into theliquid immersion region AR2 during liquid immersion exposure, forexample. Therefore, the penetration of the liquid 1 to the minute gap100 can be prevented by respectively performing water repellencetreatment on the inner side surface 30T of the channel formation member30 and the side surface 2T of the optical element 2 that form the minutegap 100.

FIG. 11 is an enlarged drawing of the minute gap 100.

As shown in FIG. 11, since water repellence treatment is performed onthe inner side surface 30T of the channel formation member 30 and theside surface 2T of the optical element 2, the rising phenomenon of theliquid 1 of the liquid immersion region AR2 does not occur, and theliquid 1 of the liquid immersion region AR2 does not get into the spacebetween the liquid repellence treatment portions 101A, 101B. On theother hand, due to the permeation phenomenon, the liquid 1 gets into thespace between the non-liquid repellence treatment portions 102A, 102B ofthe minute gap 100. Due to this liquid 1 that has gotten into the space,the inconvenience whereby gas that is present between the waterrepellence treatment portions 101A, 101B becomes mixed into the liquidimmersion region AR2 is restricted. Specifically, as shown in FIG. 12,in the case where water repellence treatment is performed up to thelower end portions of the inner side surface 30T of the channelformation member 30 and the side surface 2T of the optical element 2that form the minute gap 100, gas (air) is filled up to the lower endportion of the minute gap 100, and there is a possibility of theoccurrence of the inconvenience whereby the gas (bubbles) of the minutegap 100 gets into the liquid immersion region AR2 during liquidimmersion scanning exposure. Therefore, on the point of prevention ofthe penetration of liquid 1 to the minute gap 100, as shown in FIG. 12,liquid repellence treatment may be performed up to the lower endportion, but, as in this embodiment, by making the non-liquid repellencetreatment portions 102A, 102B in the prescribed ranges of the vicinityof the lower end portion of the minute gap 100 which comes into contactwith the liquid 1 of the liquid immersion region AR2 and making itpossible to arrange the liquid 1 in the vicinity of the lower endportion of the minute gap 100 with the aid of the permeation phenomenon,it is possible to prevent the inconvenience whereby the gas that ispresent in the minute gap 100 gets into the liquid immersion region AR2.Note that, in FIG. 11, the amount of liquid 1 that has gotten into thespace between the non-liquid repellence treatment portions 102A, 102B isslight, and stagnation does not occur, so liquid 1 with low degree ofcleanliness is not mixed into the liquid immersion region AR2 duringliquid immersion exposure.

Note that, in this embodiment, water repellence treatment is performedon both the inner side surface 30T of the channel formation member 30and the side surface 2T of the optical element 2 that form the minutegap 100, but performing water repellence treatment on at least eitherone of the surfaces will make it possible to avoid liquid 1 getting intothe minute gap 100.

As explained above, by supplying the liquid 1 after reserving aprescribed amount or more in the buffer space portion 90, it is possibleto make the flow amount distribution and/or flow rate distribution ofthe liquid 1 with respect to the supply ports 13, 14 even. Therefore, itis possible to evenly supply the liquid 1 from the supply ports 13, 14onto the substrate P.

In addition, for apparatus space convenience, etc., in the case where itis necessary to form a corner portion 92 at one portion of the supplychannel 82, bubbles tend to remain in the vicinity of this cornerportion 92, but the flow rate of the liquid 1 can be accelerated bynarrowing the channel in the vicinity of the corner portion 92, and thebubbles can be discharged to the exterior via the supply ports 13, 14 bymeans of this high speed flow of the liquid 1. Also, performing a liquidimmersion exposure operation after the bubbles have been dischargedmakes it possible to prevent mixing of the bubbles from the supplychannel 82 into the liquid immersion region AR2 and to perform exposureprocessing in a status in which bubbles are not present in the liquidimmersion region AR2. Particularly, as in this embodiment, narrowing aportion of the supply channel 82 in the vertical direction by means ofthe bank portion 44 (43) makes it possible to increase the flow rate ofthe liquid 1, which has flowed through the buffer space portion 90nearly horizontally, to strike that liquid 1 to the corner portion 92and to remove sufficiently the bubbles in the vicinity of the cornerportion 92.

Because the channel formation member 30 is a block-shaped member formedby combining the first through third members 31 to 33, which areplate-shaped members, the channel formation member 30 can absorb thevibration generated, for example, when the liquid 1 is sucked in withgas. Also, because a process such as discharge process was performed oneach of the plurality of plate-shaped members 31 to 33 to form a portionof the channel, and the channel of the liquid 1 was formed by combiningthese members, it is possible to respectively form the supply channel 82and the recovery channel 84 easily.

Note that, in this embodiment, the members 31 to 33 that form thechannel formation member 30 are square plate-shaped members, but theymay also be circular plate-shaped members, or they may be ellipticalplate-shaped members which are long in the X axis direction.

Note that, in this embodiment, the bank portion 44 (43) is rectangularin a cross-sectional view, but as shown in FIG. 13, it may be arc-shaped(curved surface-shaped) in a cross-sectional view. Or, it may be apolygonal shape such as one that is triangular or pentangular in across-sectional view. In addition, the effects of the buffer spaceportion become weaker, but, as shown in FIG. 14, the bank portion 44 maybe provided on the lower surface of the third member 33, and the narrowchannel portion 91 may be formed between that bank portion 44 and thetapered groove portion 18.

In this embodiment, the bank portion 44 is provided in the vicinity ofthe corner portion 92 of the supply channel 82, but, as shown in FIG.15, it may be provided at a position that is slightly separated from thecorner portion 92. In the example shown in FIG. 15, the bank portion 44is provided on the channel upstream side from the corner portion 92. Bydoing this as well, it is possible to form a buffer space portion 90 onthe upstream side of the channel of the bank portion 44, and it ispossible to make the supply of liquid 1 from the supply port 14 (13)even. On the other hand, providing the bank portion 44 in the vicinityof the corner portion 92 is able to make the flow rate of the liquid 1at the corner portion 92 high speed, so it is possible to preventbubbles from remaining in the corner portion 92.

In this embodiment, the bank portion 44 (43) has a uniform height in thelengthwise direction thereof, but there may also be a heightdistribution as shown in FIG. 16. The bank portion 44 shown in FIG. 16is such that the height of the center portion in the width directionthereof is higher than both end portions. In the tapered groove portion18, the flow volume of the liquid 1 at the center portion of the widthdirection thereof is greater than the flow volume at the end portion.Accordingly, by raising the center portion of the bank portion 44 in thewidth direction and making the center portion of the narrow channelportion 91 in the width direction narrower than that of both ends, it ispossible to supply liquid 1 more evenly onto the substrate P via thesupply port 14.

Note that it is desirable that the bank portion 44 (43) be providedalong the entire width direction of the supply channel 82, but it mayalso be provided on a portion thereof. Or it may also be a configurationin which a plurality of divided bank portions is discontinuouslyarranged (in island shapes). By doing this as well, the channel narrows,so it is possible to make the flow rate of the liquid 1 high speed, andit is possible to discharge the bubbles that are present in the supplychannel 82 to the outside.

Note that the bank portion (narrow channel portion) may be formed in therecovery channel 84 that recovers the liquid 1 on the substrate P.Through this, it is possible to evenly recover the liquid 1 on thesubstrate P from the slit-shaped recovery port 23.

Note that, in this embodiment, the supply channel 82 that constitutes aportion of the liquid supply mechanism 10 and recovery channel 84 thatconstitutes a portion of the liquid recovery mechanism 20 arerespectively provided as a unit inside the channel formation portion 30,but, as shown in FIG. 17, the supply channel 82 and the recovery channel84 may also be formed by mutually different members. In FIG. 17, a firstsupply member 120 that forms a supply channel 82A is provided on the −Xside of the projection optical system PL (optical element 2), and asecond supply member 121 that forms a supply channel 82B is provided onthe +X side. The respective first and second supply members 120, 121have tapered groove portions 17, 18 and bank portions 43, 44, and liquid1 is supplied onto the substrate P by means of supply ports 13, 14 thatare approximately arc-shaped in a planar view. In addition, the firstand third recovery members 122, 124 that form recovery channels 84A, 84Care provided at the −X side and +X side of the projection optical systemPL respectively, and the second and fourth recovery members 123, 125that form recovery channels 84B, 84D are provided at the −Y side and +Yside respectively. The respective first through fourth recovery members122 to 125 recover the liquid 1 on the substrate P by means of recoveryports 23A to 23D, which are arc-shaped in a planar view. In this case aswell, in addition to a minute gap 100 being formed between the innerside surfaces 120T, 121T of the first and second supply member 120, 121,which constitute the liquid supply mechanism, and the side surface 2T ofthe optical element 2, a minute gap 100 is also formed between the innerside surfaces 123T, 125T of the second and fourth recovery member 123,125, which constitute the liquid recovery mechanism, and the sidesurface 2T of the optical element 2. Then, liquid repellence treatmentis respectively performed on the inner side surfaces 120T, 121T, 123T125T and the side surface 2T.

Note that, in this embodiment, the supply ports 13, 14, which arearranged so as to oppose the substrate P, and the supply hole portions15, 16 connected thereto are vertically provided with respect to thesurface of the substrate P, and the liquid 1 is supplied to thesubstrate P from the vertical direction, but supply port 14 and supplyhole portion 16 may be formed so that the liquid 1 is supplied to thesubstrate P from the diagonal direction. In other words, the cornerportion 92 may have a configuration that changes the direction of thefluid 1, which has flowed through the buffer space portion 90 in thehorizontal direction, to the vertical direction, and it may also have aconfiguration that changes to a diagonal direction toward the substrateP. In this case as well, after reserving a prescribed amount of liquid 1in the buffer space portion 90, the liquid 1 is supplied to thesubstrate P via the narrow channel portion 91, and it is possible tosupply the liquid 1 from slit-shaped supply port 14 onto the substrate Pwhile suppressing the generation of bubbles.

Note that the channel formation member 30 is provided in the vicinity ofthe optical element 2 of the terminating end portion of the projectionoptical system PL via the minute gap 100, but in the case where the tipside surface of the optical element 2 is covered by the member thatholds the optical element 2, liquid repellence treatment should beperformed on at least one of the side surface of that member or the sidesurface 30T of the channel formation member 30.

In addition, in the above embodiment, the side surface 30T of thechannel formation member 30 is arranged so as to oppose the side surface2T of the optical element 2, but in the case where a different member isin opposition to the side surface 2T of the optical element 2, liquidrepellence treatment (making liquid repellent) should be performed on atleast one of side surface 2T of the optical element 2 or the surface(side surface) of the different member in opposition thereto.

In addition, in the above embodiment, liquid repellence treatment(making liquid repellent) is performed on at least one of the sidesurface 2T of the optical element 2 of the terminating end of theprojection optical system PL and the side surface of the member inopposition thereto, but as is disclosed in PCT International PublicationNo. WO2004/019128, for example, in the case where the space of theoptical path of the mask M side of the optical element of theterminating end of the projection optical system PL is filled withliquid, by performing liquid repellence treatment on at least one of theside surface of the optical element arranged on the mask M side withrespect to the terminating end optical element from among the pluralityof optical elements constituting the projection optical system PL andthe surface (side surface) of the member in opposition thereto, it ispossible to prevent liquid from getting into that gap and/or to preventliquid from remaining in that gap. As far as is permitted by the law ofthe country specified or selected in this patent application, thedisclosures in PCT International Publication No. WO2004/019128 areincorporated herein by reference.

Note that, in this embodiment, the supply ports are formed in a slitshape that has a prescribed length, but it may also be a divided supplyport that is plurally divided by a plurality of partition members forexample, it may have a configuration in which a plurality of straighttube portions are arrayed, or it may have a configuration in which astraight tube and a slit-shaped supply port are combined. In addition, aporous body such as a sponge-shaped member may also be provided on thesupply port. Similarly, a partition member may also be provided on therecovery port, and it may be formed with a plurality of straight tubeportions. In addition, a porous body and a partition member or astraight tube portion may be provided on the channel of the supplychannel 82 of the channel formation member 30.

Note that, in this embodiment, the configuration is one in which thesupply ports 13, 14 of the liquid supply mechanism 10 are provided onlyon both sides of the scanning direction (X axis direction) with respectto the projection region AR1, but separate supply ports may be providedon both sides of the non-scanning direction (Y axis direction), and thisplurality of supply ports may be combined to perform liquid supply. Or,the supply ports may be provided in a ring shape to completely surroundthe projection region AR1.

Note that, in this embodiment, the configuration is one in which a trapsurface 70 is provided only on both sides of the scanning direction ofthe projection region AR1 on the lower surface of the first member 31,but there may also be a configuration in which it is provided in thenon-scanning direction with respect to the projection region AR1. On theother hand, because the liquid 1 flows out easily on both sides of thescanning direction, even if it is a configuration in which a trapsurface 70 is provided only on both sides of the scanning direction ofthe projection region AR1, it is possible to capture well the liquid 1that is attempting to flow out. In addition, it is not necessary for thetrap surface 70 to be a flat surface, for example, it may be of a shapein which a plurality of flat surfaces is combined. Or, the trap surface70 may have a curved surface shape, and surface area expansionprocessing, specifically rough surface processing, may also beperformed.

Note that, in the above embodiment, it is possible to perform lyophilicprocessing on the surface of the channels of the liquid supply mechanism10 and the liquid recovery mechanism 20 through which the liquid 1flows. In particular, by performing lyophilic processing on the recoverychannel 84 that includes recovery port 23 of the liquid recoverymechanism 20, it is possible to perform liquid recovery smoothly. Inaddition, it is also possible to perform lyophilic processing to thesupply ports and the supply channels of the liquid supply mechanism 10.

In the above embodiment, the liquid 1 is comprised of pure water. Purewater has advantages in that it can be easily obtained in large quantityat semiconductor manufacturing plants, etc. and in that it has noadverse effects on the photoresist on the substrate P or on the opticalelements (lenses), etc. In addition, pure water has no adverse effectson the environment and contains very few impurities, so one can alsoexpect an action whereby the surface of the substrate P and the surfaceof the optical element provided on the front end surface of theprojection optical system PL are cleaned.

In addition, the index of refraction n of pure water (water) withrespect to exposure light EL with a wavelength of 193 nm is nearly 1.44,so in the case where ArF excimer laser light (193 nm wavelength) is usedas the light source of the exposure light EL, it is possible to shortenthe wavelength to 1/n, that is, approximately 134 nm on the substrate P,to obtain high resolution. Also, the depth of focus is expanded byapproximately n times, that is approximately 1.44 times, compared withit being in air, so in the case where it would be permissible to ensurethe same level of depth of focus as the case in which it is used in air,it is possible to further increase the numerical aperture of theprojection optical system PL, and resolution improves on this point aswell.

In this embodiment, an optical element 2 is attached to the tip end ofthe projection optical system PL, and this lens can be used to adjustthe optical characteristics, for example, the aberration (sphericalaberration, coma aberration, etc.), of the projection optical system PL.Note that an optical plate used for the adjustment of the opticalcharacteristics of the projection optical system PL may also be used asthe optical element attached to the tip end of the projection opticalsystem PL. Or, it may also be a plane-parallel plate through which theexposure light EL is able to pass.

Note that in the case where the pressure between the substrate P and theoptical element of the tip end of the projection optical system PLarising from the flow of the liquid 1 is large, it is permissible tomake that optical element not one that is replaceable but one that isfirmly secured so that the optical element does not move due to thatpressure.

Note that, in this embodiment, the configuration is one in which aliquid 1 is filled between the projection optical system PL and thesurface of the substrate P, but it may also be a configuration in whichthe liquid 1 is filled in a status in which cover glass consisting ofplane-parallel plate is attached to the surface of the substrate P, forexample.

Note that the liquid 1 of this embodiment is water, but it may be aliquid other than water. For example, if the light source of theexposure light EL is an F₂ laser, this F₂ laser light will not passthrough water, so the liquid 1 may be, for example, a fluorocarbon oilor a perfluoropolyether (PFPE) fluorocarbon fluid that an F₂ laser isable to pass through. In addition, it is also possible to use, as theliquid 1, liquids that have the transmittance with respect to theexposure light EL and whose refractive index are as high as possible andthat are stable with respect to the photoresist coated on the projectionoptical system PL and the surface of the substrate P (for example, cedaroil).

In this case as well, surface treatment is performed according to thepolarity of the liquid 1 used.

Applicable as the substrate P of the aforementioned respectiveembodiments are not only a semiconductor wafer for the manufacture ofsemiconductor devices but glass substrates for display devices, ceramicwafers for thin film magnetic heads, original plates (synthetic quartz,silicon wafer) of masks or reticles used in exposure apparatuses, andthe like.

Applicable as the exposure apparatus EX are, in addition to step andscan system scanning exposure apparatuses (scanning steppers) that movethe mask M and the substrate P in synchronization and scan-expose thepattern of a mask M, step and repeat system projection exposureapparatuses (steppers) that exposes the pattern on the mask M all atonce in a status in which the mask M and the substrate P have been madestationary and sequentially step-move the substrate P. In addition, thepresent invention is also applicable to step and switch system exposureapparatuses that partially overlay and transfer at least two patterns onthe substrate P.

In addition, the present invention can also be applied to twin stageexposure apparatuses that separately mount the substrate to be treated,such as a wafer, and are provided with two independently movable stagesin the XY direction. The structure and the exposure operation of thetwin stage exposure apparatus are disclosed in, for example, JapaneseUnexamined Patent Application, First Publication No. H10-163099,Japanese Unexamined Patent Application, First Publication No. H10-214783(corresponding U.S. Pat. Nos. 6,341,007, 6,400,441, 6,549,269 and6,590,634), Published Japanese Translation No. 2000-505958 of the PCTInternational Application (corresponding U.S. Pat. No. 5,969,441), andU.S. Pat. No. 6,208,407. As far as is permitted, the disclosures in theabove-mentioned Japan patent applications and the U.S. patents areincorporated herein by reference.

The types of exposure apparatuses EX are not limited to exposureapparatuses for semiconductor element manufacture that exposes asemiconductor element pattern onto a substrate P but are also widelyapplicable to exposure apparatuses for the manufacture of liquid crystaldisplay elements and for the manufacture of displays, and exposureapparatuses for the manufacture of thin film magnetic heads, imagepickup elements (CCD) and reticles or masks.

In the case where a linear motor is used in the substrate stage PST orthe mask stage MST, an air floating type that uses air bearings or amagnetic levitation type that uses Lorentz's force or reactance forcemay be used. In addition, the respective stages PST, MST may be thetypes that move along a guide or may be the guideless type in which aguide is not provided. Examples that use a linear motor for the stageare disclosed in U.S. Pat. Nos. 5,623,853 and 5,528,118. As far as ispermitted, the disclosures in U.S. Pat. Nos. 5,623,853 and 5,528,118 areincorporated herein by reference.

For the drive mechanisms of the respective stages PST, MST, a planarmotor that places in opposition a magnet unit that two-dimensionallyarranges magnets and an armature unit that arranges coilstwo-dimensionally and drives the respective stages PST, MST byelectromagnetic force may be used. In such a case, either the magnetunit or the armature unit is connected to the stage PST, MST, and theother from among the magnet unit and the armature unit may be providedon the moving surface side of the stage PST, MST.

The reaction force generated by the movement of the substrate stage PSTmay be caused to mechanically escape to the floor (ground) using a framemember so that it is not transmitted to the projection optical systemPL. This reaction force handling method is disclosed in detail in, forexample, U.S. Pat. No. 5,528,118 (Japanese Unexamined PatentApplication, First Publication No. H8-166475). As far as is permitted,the disclosures in the above-mentioned U.S. Patents, as well as theJapan Patent Applications are incorporated herein by reference.

The reaction force generated by the movement of the MASK stage MST maybe caused to mechanically escape to the floor (ground) using a framemember so that it is not transmitted to the projection optical systemPL. This reaction force handling method is disclosed in detail in, forexample, U.S. Pat. No. 5,874,820 (Japanese Unexamined PatentApplication, First Publication No. H8-330224). As far as is permitted,the disclosures in the above-mentioned U.S. Patents, as well as theJapan Patent Applications are incorporated herein by reference.

The exposure apparatus EX of this embodiment is manufactured byassembling various subsystems, including the respective constituentelements presented in the Scope of Patents Claims of the presentapplication, so that the prescribed mechanical precision, electricalprecision and optical precision can be maintained. To ensure theserespective precisions, performed before and after this assembly areadjustments for achieving optical precision with respect to the variousoptical systems, adjustments for achieving mechanical precision withrespect to the various mechanical systems, and adjustments for achievingelectrical precision with respect to the various electrical systems.

The process of assembly from the various subsystems to the exposureapparatus includes mechanical connections, electrical circuit wiringconnections, air pressure circuit piping connections, etc. among thevarious subsystems. Obviously, before the process of assembly from thesevarious subsystems to the exposure apparatus, there are the processes ofindividual assembly of the respective subsystems. When the process ofassembly to the exposure apparatuses of the various subsystems hasended, overall assembly is performed, and the various precisions areensured for the exposure apparatus as a whole. Note that it ispreferable that the manufacture of the exposure apparatus be performedin a clean room in which the temperature, the degree of cleanliness,etc. are controlled.

As shown in FIG. 18, microdevices such as semiconductor devices aremanufactured by going through a step 201 that performs microdevicefunction and performance design, a step 202 that creates the mask(reticle) based on this design step, a step 203 that manufactures thesubstrate that is the device base material, a substrate processing step204 that exposes the pattern on the mask onto a substrate by means ofthe exposure apparatus EX of the aforementioned embodiment, a deviceassembly step (including the dicing process, bonding process andpackaging process) 205, an inspection step 206, etc.

The present invention is an exposure apparatus that, by forming a liquidimmersion region on a portion of the substrate and projecting thepattern image onto the substrate via the liquid that forms the liquidimmersion region and a projection optical system, exposes the substrate,it is provided with a liquid supply mechanism that has a supply portarranged to oppose the surface of the substrate, a buffer space isformed in the channel of the liquid supply mechanism, and supply of theliquid to the supply port is started after reserving a prescribed amountor more of liquid in the buffer space, so it is possible to evenlysupply liquid onto the substrate while preventing mixing in of bubblesand impurities, and it is therefore possible to prevent deterioration ofthe pattern image and perform exposure with good accuracy.

What is claimed is:
 1. A liquid confinement member that supplies liquidto and collects the liquid from a liquid immersion area that is formedadjacent to a final optical element of an immersion exposure apparatus,the liquid confinement member comprising: a channel formation memberconfigured to surround a portion of the final optical element of theimmersion exposure apparatus, the channel formation member including: ahole through which exposure light projected by the final optical elementpasses, a liquid supply opening through which the liquid is supplied tothe liquid immersion area, a liquid recovery opening through which theliquid is recovered from the liquid immersion area, a liquid supplychannel by which the liquid is supplied to the liquid supply opening,and a liquid recovery channel by which the liquid is recovered from theliquid recovery opening, wherein at least one of the liquid supplychannel and the liquid recovery channel includes a protrusion thatprotrudes into a portion of the channel.
 2. The liquid confinementmember of claim 1, wherein the protrusion extends in a directionsubstantially parallel to an axis of the hole.
 3. The liquid confinementmember of claim 2, wherein a portion of the channel located upstream ofthe protrusion extends in a direction orthogonal to the axis of thehole.
 4. The liquid confinement member of claim 2, wherein a portion ofthe channel located downstream of the protrusion extends in a directionorthogonal to the axis of the hole.
 5. The liquid confinement member ofclaim 2, wherein a first portion of the channel located upstream of theprotrusion extends in a direction orthogonal to the axis of the hole,and a second portion of the channel located downstream of the protrusionextends in the direction orthogonal to the axis of the hole.
 6. Theliquid confinement member of claim 1, wherein a cross-section of theprotrusion is rectangular.
 7. The liquid confinement member of claim 1,wherein an end of the protrusion is curved.
 8. The liquid confinementmember of claim 1, wherein the protrusion extends completely across awidth of the channel.
 9. The liquid confinement member of claim 1,wherein the protrusion extends partially across a width of the channel.10. The liquid confinement member of claim 1, wherein the protrusion hasa uniform height.
 11. The liquid confinement member of claim 1, whereinthe protrusion has a non-uniform height.
 12. The liquid confinementmember of claim 11, wherein the height of a center portion of theprotrusion is greater than the height of end portions of the protrusion.13. The liquid confinement member of claim 1, wherein the channelformation member is made of metal.
 14. The liquid confinement member ofclaim 1, further comprising a plate attached to the channel formationmember so as to face the liquid supply channel and the liquid recoverychannel, a first distance between a lower surface of the plate and anend of the protrusion being smaller than a second distance between thelower surface of the plate and bottom surfaces of the liquid supplychannel and the liquid recovery channel.
 15. The liquid confinementmember of claim 1, wherein the protrusion protrudes into the liquidsupply channel.
 16. The liquid confinement member of claim 15, whereinat least a part of the liquid supply channel extends in a direction thatis orthogonal to an axis of the hole, and the protrusion extends in adirection substantially parallel to the axis of the hole.
 17. The liquidconfinement member of claim 16, wherein a portion of the liquid supplychannel located upstream of the protrusion extends in the directionorthogonal to the axis of the hole.
 18. The liquid confinement member ofclaim 16, wherein a portion of the liquid supply channel locateddownstream of the protrusion between the liquid supply opening and theprotrusion extends in the direction orthogonal to the axis of the hole.19. The liquid confinement member of claim 16, wherein a first portionof the liquid supply channel located upstream of the protrusion extendsin the direction orthogonal to the axis of the hole, and a secondportion of the liquid supply channel located downstream of theprotrusion extends in the direction orthogonal to the axis of the hole.20. The liquid confinement member of claim 15, wherein a cross-sectionof the protrusion is rectangular.
 21. The liquid confinement member ofclaim 15, wherein an end of the protrusion is curved.
 22. The liquidconfinement member of claim 15, wherein the protrusion extendscompletely across a width of the liquid supply channel.
 23. The liquidconfinement member of claim 15, wherein the protrusion extends partiallyacross a width of the liquid supply channel.
 24. The liquid confinementmember of claim 15, wherein the protrusion has a uniform height.
 25. Theliquid confinement member of claim 15, wherein the protrusion has anon-uniform height.
 26. The liquid confinement member of claim 25,wherein the height of a center portion of the protrusion is greater thanthe height of end portions of the protrusion.
 27. The liquid confinementmember of claim 15, further comprising a plate attached to the channelformation member so as to face the liquid supply channel and the liquidrecovery channel, a first distance between a lower surface of the plateand an end of the protrusion being smaller than a second distancebetween the lower surface of the plate and bottom surface of the liquidsupply channel.
 28. An immersion exposure apparatus comprising: aprojection system including a final optical element that has a lightemitting surface arranged to be in contact with a liquid and has anouter surface arranged above the light emitting surface; a holdingmember configured to hold a substrate and movable to a position at whichthe substrate held by the holding member is located below the lightemitting surface of the final optical element when the substrate is tobe exposed by exposure light projected through the projection system andthe liquid; and a liquid confinement member that supplies the liquid toand collects the liquid from a liquid immersion area that is formedbetween the light emitting surface of the final optical element and thesubstrate held by the holding member, the liquid confinement memberhaving a channel formation member configured to surround a portion ofthe final optical element with a gap between the final optical elementand the channel formation member, the channel formation memberincluding: a hole through which the exposure light projected by thefinal optical element passes, a liquid supply opening through which theliquid is supplied to the liquid immersion area, a liquid recoveryopening through which the liquid is recovered from the liquid immersionarea, a liquid supply channel by which the liquid is supplied to theliquid supply opening, and a liquid recovery channel by which the liquidis recovered from the liquid recovery opening, wherein at least one ofthe liquid supply channel and the liquid recovery channel includes aprotrusion that protrudes into a portion of the channel.
 29. Theimmersion exposure apparatus of claim 28, wherein the protrusion extendsin a direction substantially parallel to an optical axis of the finaloptical element.
 30. The immersion exposure apparatus of claim 29,wherein a portion of the channel located upstream of the protrusionextends in a direction orthogonal to the optical axis of the finaloptical element.
 31. The immersion exposure apparatus of claim 29,wherein a portion of the channel located downstream of the protrusionextends in a direction orthogonal to the optical axis of the finaloptical element.
 32. The immersion exposure apparatus of claim 29,wherein a first portion of the channel located upstream of theprotrusion extends in a direction orthogonal to the optical axis of thefinal optical element, and a second portion of the channel locateddownstream of the protrusion extends in the direction orthogonal to theoptical axis of the final optical element.
 33. The immersion exposureapparatus of claim 28, wherein a cross-section of the protrusion isrectangular.
 34. The immersion exposure apparatus of claim 28, whereinan end of the protrusion is curved.
 35. The immersion exposure apparatusof claim 28, wherein the protrusion extends completely across a width ofthe channel.
 36. The immersion exposure apparatus of claim 28, whereinthe protrusion extends partially across a width of the channel.
 37. Theimmersion exposure apparatus of claim 28, wherein the protrusion has auniform height.
 38. The immersion exposure apparatus of claim 28,wherein the protrusion has a non-uniform height.
 39. The immersionexposure apparatus of claim 38, wherein the height of a center portionof the protrusion is greater than the height of end portions of theprotrusion.
 40. The immersion exposure apparatus of claim 28, whereinthe channel formation member is made of metal.
 41. The immersionexposure apparatus of claim 28, further comprising a plate attached tothe channel formation member so as to face the liquid supply channel andthe liquid recovery channel, a first distance between a lower surface ofthe plate and an end of the protrusion being smaller than a seconddistance between the lower surface of the plate and bottom surfaces ofthe liquid supply channel and the liquid recovery channel.
 42. Theimmersion exposure apparatus of claim 28, wherein the protrusionprotrudes into the liquid supply channel.
 43. The immersion exposureapparatus of claim 42, wherein at least a part of the liquid supplychannel extends in a direction that is orthogonal to an optical axis ofthe final optical element, and the protrusion extends in a directionsubstantially parallel to the optical axis of the final optical element.44. The immersion exposure apparatus of claim 43, wherein a portion ofthe liquid supply channel located upstream of the protrusion extends inthe direction orthogonal to the optical axis of the final opticalelement.
 45. The immersion exposure apparatus of claim 43, wherein aportion of the liquid supply channel located downstream of theprotrusion between the liquid supply opening and the protrusion extendsin the direction orthogonal to the optical axis of the final opticalelement.
 46. The immersion exposure apparatus of claim 43, wherein afirst portion of the liquid supply channel located upstream of theprotrusion extends in the direction orthogonal to the optical axis ofthe final optical element, and a second portion of the liquid supplychannel located downstream of the protrusion extends in the directionorthogonal to the optical axis of the final optical element.
 47. Theimmersion exposure apparatus of claim 42, wherein a cross-section of theprotrusion is rectangular.
 48. The immersion exposure apparatus of claim42, wherein an end of the protrusion is curved.
 49. The immersionexposure apparatus of claim 42, wherein the protrusion extendscompletely across a width of the liquid supply channel.
 50. Theimmersion exposure apparatus of claim 42, wherein the protrusion extendspartially across a width of the liquid supply channel.
 51. The immersionexposure apparatus of claim 42, wherein the protrusion has a uniformheight.
 52. The immersion exposure apparatus of claim 42, wherein theprotrusion has a non-uniform height.
 53. The immersion exposureapparatus of claim 52, wherein the height of a center portion of theprotrusion is greater than the height of end portions of the protrusion.54. The immersion exposure apparatus of claim 42, further comprising aplate attached to the channel formation member so as to face the liquidsupply channel and the liquid recovery channel, a first distance betweena lower surface of the plate and an end of the protrusion being smallerthan a second distance between the lower surface of the plate and bottomsurface of the liquid supply channel.
 55. A device manufacturing methodcomprising: projecting an image of a pattern onto a substrate throughthe projection system of the immersion exposure apparatus according toclaim 28; and processing the exposed substrate.
 56. The immersionexposure apparatus of claim 42, wherein the liquid flows downwardlydownstream of the protrusion.
 57. The immersion exposure apparatus ofclaim 56, wherein the final optical element has a bottom surface and anouter surface extending upwardly from the bottom surface, and the liquidflows downwardly parallel to the outer surface of the final opticalelement downstream of the protrusion.
 58. The immersion exposureapparatus of claim 56, wherein the liquid flows toward the substratedownstream of the protrusion during exposure.